Piezoelectricity Multi-axis Translation Stages
Piezoelectric motor drive; No return clearance, with brake function inside; Nano level high resolution and accuracy; Fast response speed in milliseconds to sub milliseconds, with speeds up to 300 millimeters per second; Long travel, theoretically without travel restrictions; Ultra thin design, compact structure; No magnetism, no oil, no electromagnetic interference, vacuum compatible; Widely used in semiconductor equipment, micro/nano processing, optoelectronic testing, biomedical and other fields.
Piezoelectricity Multi-axis Translation Stages
Characteristics:
Piezoelectric motor drive;
No return clearance, with brake function inside;
Nano level high resolution and accuracy;
Fast response speed in milliseconds to sub milliseconds, with speeds up to 300 millimeters per second;
Long travel, theoretically without travel restrictions;
Ultra thin design, compact structure;
No magnetism, no oil, no electromagnetic interference, vacuum compatible;
Widely used in semiconductor equipment, micro/nano processing, optoelectronic testing, biomedical and other fields.
