In the cutting-edge precision scenarios such as micro-nano optical alignment, high-precision sample plane scanning, chip precise calibration, thin film morphology characterization, microscopic imaging plane adjustment, etc., the drawbacks of the traditional split-type electric dual-axis stage are prominent: the mechanical screw rod transmission has backstroke gap, friction vibration, cumulative error, the linkage is not synchronized at low speed, and it is prone to cause alignment deviation, imaging distortion, and discrete detection data. The split assembly structure has large assembly errors, weak orthogonal accuracy, and is prone to drift during long-term operation, which cannot meet the strict requirements of two-dimensional synchronous linkage, nanometer-level uniform feed, no vibration, no gap, and high repeatability positioning in micro-nano working conditions. To meet the urgent need for ultra-high precision micro adjustment, Saifan Optoelectronics has launched the piezoelectric dual-axis translation stage. Relying on the integrated piezoelectric drive and flexible hinge gapless architecture, it breaks through the accuracy bottleneck of traditional mechanical dual-axis stages and becomes the core main equipment for two-dimensional micro-nano positioning and high-precision plane control.
Integrated dual-axis gapless architecture, no error in two-dimensional linkage
The piezoelectric dual-axis translation stage completely abandons the mechanical friction transmission structure of traditional dual-axis equipment such as screws, rails, and gears, adopts dual-axis piezoelectric ceramic drive + integrated flexible hinge overall molding process, and realizes X and Y two-dimensional synchronous electric translation control from the structural root, eliminating backstroke gap, transmission jamming, low-speed jitter, and assembly cumulative error. The two axes of the entire machine have the same benchmark, symmetrical and regular layout, naturally have ultra-high orthogonal accuracy, does not need repeated calibration for alignment, completely solves the problems of axis system deviation, linkage lag, and position deviation in split assembly equipment, and perfectly adapts to high-precision working conditions such as global plane scanning, micro-device alignment, and two-dimensional calibration of precise optical paths.
The body adopts an extremely compact integrated design, without redundant transmission components, small in size, low space occupation, balanced and solid rigidity, minimal force deformation, no lateral shaking during two-dimensional translation, no trajectory deviation, stable and reliable plane positioning benchmark. The entire machine is without magnetism, no mechanical wear, no lubricating oil, no dust during operation, no electromagnetic interference, suitable for various high-sensitive precision experiments and clean working conditions. Standardized universal installation holes are标配， can be quickly adapted to optical platforms， micro-devices， vacuum chambers， and automated precise detection systems， can independently complete two-dimensional plane micro adjustment， or be combined with vertical and rotational modules to build multi-dimensional precise control systems， ready for use immediately without complex debugging， with full flexibility in scene adaptation.
Piezoelectric synchronous precise drive， stable operation with nanometer-level zero drift
Two-dimensional synchronous smoothness， consistent accuracy throughout the area， nanometer-level fine feed， are the core core advantages of the piezoelectric dual-axis translation stage. The equipment relies on the mature piezoelectric inverse effect drive principle， combined with the optimized dual-axis flexible gapless guiding structure， the entire process has no mechanical contact friction， two-dimensional displacement feed is uniform and continuous， fine adjustment step is extremely delicate， positioning resolution can reach nanometer and sub-nanometer levels， can accurately capture the micro displacement deviation of the plane， completely solve the problems of rough fine adjustment， uneven walk， and end-point accuracy attenuation in traditional dual-axis equipment. Whether it is single-point precise locking， small-amplitude reciprocating micro adjustment， or large-area global continuous scanning， the dual-axis linkage synchronization is extremely strong， the entire displacement output is stable and balanced， no deviation， no drift， no accuracy loss， firmly holding the accuracy bottom line of micro-nano plane precision operations.
The equipment supports open-loop and closed-loop dual-mode precise control， the closed-loop is equipped with high-precision sensor feedback system， two-dimensional point positions are real-time corrected and precisely locked， plane positioning consistency is extremely strong. Continuing the core advantages of piezoelectric equipment， millisecond-level rapid response， start-stop completed instantly， no inertia walk， no lag delay， automatic self-locking in static positioning， zero power consumption， effectively eliminating static positioning deviation， rebound and other problems. It can be paired with a dedicated motion controller and supports programmatic, automated, and digital trajectory control. Users can freely set two-dimensional motion trajectories, translation speeds, fine-tuning steps, and operation intervals, converting the uncertainty of manual fine-tuning into standardized and replicable precise operation processes. The equipment is resistant to vibration, deformation, and aging, operates quietly without disturbance, and is clean without dirt. It can be long-term adapted to high-end laboratory fine conditions, vacuum clean environments, and precision manufacturing scenarios.
Multi-scenario all-round compatibility, deeply focusing on the urgent needs of two-dimensional micro-nano precision
With the advantages of dual-axis synchronous linkage, nanometer-level all-round precise control, vibration-free and gap-free operation, and easy integration, the piezoelectric dual-axis translation stage precisely fills the gap of two-dimensional micro-nano ultra-high precision positioning equipment, covering advanced research, optical debugging, and precision manufacturing scenarios:
Frontier research experiments: Suitable for low-dimensional material plane characterization, nanoscale optical all-round experiments, microscopic physical two-dimensional displacement calibration, and quantum optical fine debugging, with extreme two-dimensional nanometer precision, helping to realize breakthroughs in frontier basic research projects.
Optical precision debugging: Widely used for two-dimensional optical path precise alignment, optical element plane calibration, laser light spot all-round leveling, and fiber array precise coupling. The dual-axis synchronous stable operation completely eliminates planar deviation, significantly improving the debugging accuracy and coupling efficiency of the optical system.
Microscopy imaging field: Can be applied to ultra-high-resolution microscopic plane scanning, biological sample two-dimensional alignment leveling, and microscopic morphology all-round imaging calibration. Without vibration or drift operation, it eliminates imaging artifacts and picture distortion, ensuring uniform and clear all-round imaging.
Semiconductor and precision integration: Compact and clean body suitable for microchip alignment, optical component plane detection, vacuum precision processing equipment, and automated micro-nano detection fixtures. Stable two-dimensional high-precision performance effectively improves the processing and detection yield of micro-nano devices.
Domestic high-quality and cost-effective, micro-nano two-dimensional conditions cost reduction preferred
Most high-precision nano-level dual-axis positioning equipment on the market are imported high-end models, which are expensive, have long supply cycles, and have cumbersome after-sales and maintenance. Ordinary domestic mechanical dual-axis tables generally have large gaps, poor synchronization, unstable precision, and obvious vibration. They cannot meet the requirements of micro-nano two-dimensional precise control. The piezoelectric dual-axis translation stage relies on domesticized precision manufacturing technology and achieves imported-level two-dimensional nanometer precise control performance at an affordable price, breaking the price barrier of high-end micro-nano positioning equipment. The equipment has no mechanical wear, no lubrication, zero daily maintenance, extremely low failure rate, long service life, and can maintain all-round precision stability without frequent calibration for a long time, significantly reducing the cost of high-end research and precision equipment integration and operation, and is a high-quality and cost-effective preferred choice for the upgrading of precise equipment in university frontier laboratories, optical research institutions, and semiconductor precision manufacturing enterprises. Efficiently empowering various two-dimensional ultra-high precision and fine research experiments and micro-nano precise manufacturing operations with an integrated seamless piezoelectric architecture, all-round balanced nano precise control performance, and versatile scene adaptability!
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