In high-end research and manufacturing scenarios such as large-scale microscopic scanning, wide-range optical alignment, semiconductor wafer inspection, full-field characterization of thin films, and large-scale alignment of precision devices, traditional mini piezoelectric actuators have limited travel and cannot perform full-field continuous scanning; while conventional electric linear stages have problems such as friction gaps, vibration interference, and insufficient resolution, making it difficult to meet the dual needs of large travel movement, nanometer-level high precision, ultra-high stability, and non-disturbance operation. To address the pain points of large-scale precise micro-nano positioning conditions, the long-stroke piezoelectric linear stage has been launched. It breaks through the travel bottleneck of traditional piezoelectric equipment and combines piezoelectric precise drive technology with stroke amplification structure to achieve both large-range displacement and nanometer-level precise control. It becomes the core preferred equipment for long-distance, high-precision, and zero-drift precise regulation.
Breaking through travel limitations, the long-stroke piezoelectric linear stage takes into account both range and precision
The long-stroke piezoelectric linear stage breaks through the industry shortcoming that traditional piezoelectric actuators can only perform micro-stroke micro-adjustment. It adopts a piezoelectric ceramic drive + flexible hinge displacement amplification integrated structure, without the need for screws, gears, etc. in mechanical transmission components. While retaining the advantages of piezoelectric equipment such as no friction and high response, it significantly expands the effective displacement stroke and perfectly adapts to various large-range continuous scanning and long-distance precise alignment scenarios. The equipment discards the bulky transmission structure of traditional electric stages and has a compact and regular overall layout, without redundant components. It not only solves the problem of insufficient travel of mini piezoelectric actuators and inability to perform full-field operations, but also avoids the drawbacks of complex mechanical displacement stage structure, large space occupation, and high cumulative error.
The entire machine adopts an integrated precision molding process, with precise shaft guidance and excellent coaxiality. It fundamentally eliminates the problems of assembly gap and position deviation of separate equipment. The design without magnetism and mechanical friction ensures no electromagnetic interference, no vibration jitter, and no impact on precise optical signals, microscopic detection samples, and microelectronic devices. It is suitable for various high-sensitivity and high-precision experimental environments. Standardized installation holes allow for quick adaptation to optical platforms, micro devices, and automated detection systems. It is ready to use immediately without complex debugging, and the flexibility of scene adaptation is maximized.
Piezoelectric friction-free precise control, long-range full-field nanometer-level zero drift
Large-range no loss of precision and long-stroke full-range stable control are the core core advantages of the long-stroke piezoelectric linear stage. The equipment relies on the mature piezoelectric inverse effect drive principle and combines an optimized flexible guide and displacement amplification structure. The entire process has no mechanical friction, no return gap, and no transmission jamming, completely solving the pain points of traditional long-stroke displacement equipment such as low-speed jitter, segmented deviation, and poor repeatability. The equipment achieves uniform and smooth full-range displacement, even when running for a long distance continuously, still maintaining ultra-nanometer-level resolution, fine control of small steps, and can accurately complete large-range multi-point calibration, full-field scanning, and continuous precise alignment under strict conditions.
The equipment supports open-loop and closed-loop dual-mode control. The closed-loop is equipped with a high-precision sensor feedback system. The long-stroke full-range positioning accuracy is uniform and consistent, without segmented errors or end drift. Long-term high-frequency reciprocating operation and continuous scanning always lock onto nanometer-level precision. Continuing the core advantages of piezoelectric equipment, it has millisecond-level rapid response, no lag in start and stop, no inertia offset, and automatic self-locking in static positioning, zero power consumption. It does not shift position when stationary, perfectly solving the industry problems of end positioning deviation and long-term running accuracy attenuation of long-stroke equipment, firmly holding the precision bottom line for full-range precise operations.
Multi-scenario full-range adaptation, deeply focusing on long-range micro-nano precise needs
With its long-stroke, nanometer-level precise control, no disturbance, high response, easy integration, and differentiated advantages, the long-stroke piezoelectric linear stage precisely fills the gap in large-scale micro-nano positioning equipment and fully covers various high-end research and precision manufacturing scenarios:
Frontier scientific research experiments: It is suitable for large-scale material micro-area characterization, nanoscale optical full-field experiments, long-range displacement testing of precise physics, and quantum optical debugging. The long-range continuous scanning combined with nanometer precision helps with large-scale precise scientific exploration.
Ultra-high resolution microscopy field: Widely used for global scanning of biological sections, large-area sample microscopic imaging, long-distance focusing calibration of microscopic samples, vibration-free and disturbance-free operation, eliminating imaging artifacts, ensuring clear and uniform global imaging.
Semiconductor and precision inspection: Can be applied to global inspection of wafers, large-area film performance testing, long-range alignment calibration of optoelectronic devices, precise adjustment of nano-imprinting, consistent high precision across the entire area, effectively improving the yield and consistency of large-area device detection.
Optics and high-end equipment integration: Compatible with wide-range optical path calibration, global debugging of laser systems, long-range micro-control modules of precision instruments, and automated high-precision scanning equipment, enabling continuous nanometer-level precise displacement over a wide range, helping to upgrade precision equipment with high precision and intelligence across the entire area.
Maintenance-free high cost-effectiveness, long-term precision operation cost-saving preferred
The imported long-range nanometer positioning equipment on the market is expensive, with cumbersome maintenance, long supply cycle, and ordinary domestic long-range displacement tables generally have shortcomings such as low precision, large jitter, and poor repeatability, unable to balance travel and precision. The long-range piezoelectric translation stage, relying on domestic advanced manufacturing technology, realizes imported-level long-range + high precision dual performance with affordable pricing, breaking the price barrier of high-end long-distance micro-nanopositioning equipment. The equipment has no mechanical wear, no need for lubrication, no daily maintenance, has extremely low failure rate, long service life, and can maintain global precision stability without frequent calibration, significantly reducing long-term operation and iteration costs. It is a high-cost-effectiveness preferred choice for equipment upgrades in university front-line laboratories, optical research institutions, and semiconductor precision manufacturing enterprises.
Expand the boundaries, determine with nanometer precision. The long-range piezoelectric translation stage provides frictionless precise piezoelectric drive and stable high-precision performance, efficiently empowering various large-scale, ultra-high-precision micro-nano scientific research experiments and precision manufacturing operations!
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